Method of fabricating an ink jet recording head

摘要

A metallic orifice plate having no aperture and a substrate is molded in a single unit with a polymer material. An aperture is formed by photolithography on a designated position of the molded orifice plate with reference to an alignment mark present on the substrate. Using the metallic orifice plate on which the aperture is formed as a mask and exposing a laser light on a polymer material reachable through the aperture, an orifice to be used for ejecting ink and to be connected to an ink fluid route formed inside the polymer material is formed. An ink supply port penetrating through the substrate is connected to the ink fluid route. In molding the orifice plate and the substrate in a single unit, a transfer forming method is used. In exposing a laser light, an excimer laser oscillator is used. The ink jet recording head fabricated by the above described method is mounted in an ink tank to be installed into a printer.