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经营范围
发明名称
METHOD AND DEVICE FOR SUPPLYING POWDER TO SENSITIVE DC SYSTEM
摘要
申请公布号
JPH11243685(A)
申请公布日期
1999.09.07
申请号
JP19970166421
申请日期
1997.06.23
申请人
ADVANCED ENERG IND INC
发明人
DRUMMOND GEOFFREY N
分类号
H02M3/28;C23C14/38;C23C14/54;C23C16/50;H01J37/32;H01L21/302;H02M3/22;H02M9/06;H05H1/24;H05H1/46;(IPC1-7):H02M3/28
主分类号
H02M3/28
代理机构
代理人
主权项
地址
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