MET0HOD OF USING SCANNING PROBE MICROSCOPE ALLOWING CLEANING OF PROBE TIP IN AMBIENT ATMOSPHERE

摘要

A method of use of a scanning probe microscope includes the step (S11) of mounting a probe (110) to a scanning probe microscope (100) in ambient atmosphere, the step (S12) of drawing on a surface of a standard sample by two-dimensionally scanning while keeping constant a tunnel current under feedback control of a distance between a standard sample (120) and the probe, the step (S13) of applying pulse voltage between the probe and the standard sample while two-dimensionally scanning, with feedback control stopped at each scanning point, the step (S14) for obtaining drawn image of the surface of the standard sample again, comparing the obtained drawn image with the drawn image obtained in the step (S12) of drawing on the surface of the standard sample thereby determining cleanness of the probe, the step (S15) of repeating the step (S13) of pulse application and the step (S14) of determination of cleanness until the probe is cleaned, the step (S16) for replacing the standard sample by a sample (130) for measurement after cleanness of the probe is confirmed, and the step (S17) of drawing. <IMAGE>