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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11238806(A)
申请公布日期
1999.08.31
申请号
JP19980041454
申请日期
1998.02.24
申请人
SHARP CORP
发明人
KITADE AKIO
分类号
H01L21/8234;H01L27/088;(IPC1-7):H01L21/823
主分类号
H01L21/8234
代理机构
代理人
主权项
地址
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