发明名称 GLASS SUBSTRATE CARRIER DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To support a proper position of a glass substrate by a claw without exchanging the claw in cases where size in the cross direction of the glass substrate is different by providing a mechanism to slide in the cross direction of the glass substrate on the claw. SOLUTION: A glass substrate 5 is supported by a claw 1, carries out opening and closing motion and vertical motion of the claw 1 and is arranged on a heating and cooling plate 4. Thereafter, the glass substrate 5 is sequentially carried by reciprocal motion of the claw 1. Hereby, the claw 1 is devised to slide in the cross direction of the glass substrate 5 by loosening a screw 2 fixing the claw 1 by machining a slot on a fixed part of the claw 1. Additionally, it is devised to stop sliding the claw 1 by specifying a position of the screw 2 for fixing the claw 1. Thereafter, the claw 1 is fixed by the fixing screw 2 by providing a groove in a direction orthogonal with a part forming the slot of the claw 1 so as to precisely position it at a position to support size of the glass substrate 5 to correspond in cases where regulation of more than three kinds is required in the cross direction of the glass substrate 5.</p>
申请公布号 JPH11227942(A) 申请公布日期 1999.08.24
申请号 JP19980034719 申请日期 1998.02.17
申请人 TORAY IND INC 发明人 SASAKI YUICHIRO;YUASA MASASHI
分类号 G02B5/20;B65G49/06;H01L21/677;(IPC1-7):B65G49/06;H01L21/68 主分类号 G02B5/20
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