| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact piezoelectric actuator, and a fabrication method thereof, in which piezoelectric elements are formed at high positional accuracy and high integration density through a simplified fabrication process. SOLUTION: A pie-zoelectric material green sheet applied with a plurality of common electrodes, a piezoelectric material green sheet applied with a plurality of signal applying electrodes, and a sheet applied with no electrode are employed. A group of alternate laminate composed of a plurality of sheets applied with common electrode and a plurality of sheets applied with signal applying electrode and a group of laminate composed of a plurality of sheets applied with no inner electrode are laminated alternately and fired. Subsequently, grid-like trenches 12, 13 are made in the displacement output face side to form checkered driving posts 8 thus realizing a compact piezoelectric actuator having high positional accuracy and high integration density. The common electrode and the signal applying electrode can be connected electrically with an external power supply on the back plane 1r of the output plane for each driving post. |
