ELECTRON BEAM DRAWING METHOD AND DEVICE, DRAWING DATA PROCESSING METHOD AND DEVICE USED FOR ELECTRON BEAM DRAWING AND MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19980024716-传众专利搜索

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发明名称	ELECTRON BEAM DRAWING METHOD AND DEVICE, DRAWING DATA PROCESSING METHOD AND DEVICE USED FOR ELECTRON BEAM DRAWING AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH11224842(A)	申请公布日期	1999.08.17
申请号	JP19980024716	申请日期	1998.02.05
申请人	SONY CORP	发明人	KOYAMA MASAAKI
分类号	G03F7/20;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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