发明名称 Solvent systems for low dielectric constant polymeric materials
摘要 A polymeric low dielectric constant solution includes a low dielectric constant polymer dissolved in an aromatic aliphatic ether solvent. The polymer preferably is a poly(arylene ether) and the solvent preferably is anisole, methylanisole, phenetole or mixtures thereof. A process for forming a dielectric film on a substrate by spin-coating the polymeric solution is also provided.
申请公布号 AU2572799(A) 申请公布日期 1999.08.16
申请号 AU19990025727 申请日期 1999.02.01
申请人 ALLIED-SIGNAL INC. 发明人 TIAN-AN CHEN;KREISLER S. Y. LAU;QIANG ZHAO
分类号 C08J3/09;H01L21/312 主分类号 C08J3/09
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