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发明名称
METHOD OF FABRICATING SALICIDE STRUCTURE SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100215528(B1)
申请公布日期
1999.08.16
申请号
KR19960040931
申请日期
1996.09.19
申请人
NIPPON ELECTRIC K.K.
发明人
ISHIKAWA, HIRAKU
分类号
H01L29/78;C23C16/40;H01L21/02;H01L21/3213;H01L21/336;(IPC1-7):H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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