| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical inspection apparatus whose structure is simple, in which a change between the illuminance of light transmitted through a translucent object to be inspected is reduced and the illuminance of light passed through a part where the object to be inspected does not exist is reduced and by which a correct image can be always fetched. SOLUTION: In an optical inspection apparatus, a translucent object 1 to be inspected is irradiated by an illumination device 12 which is arranged on one side of an inspection stage 6, the irradiated object 1 to be inspected is imaged by an image read part 7 which is arranged on the other side of the inspection stage 6, and the visual inspection of a circuit pattern (a) formed on the object 1 to be inspected is performed automatically. At this time, a condensing lens 25 by which the illumination light of the illumination device 12 is condensed on the object 1 to be inspected is arranged between the illumination device 12 and the inspection stage 6, and an attenuation part which attenuates the illuminance in a part of the illumination light is installed on the optical axis of the condensing lens 25. |
