Ceramic heater and method of manufacturing the same

摘要

Ceramic raw powder containing conductive ceramic powder is mixed with a prescribed quantity of a molding assistant containing carbon component. This mixture is molded into a prescribed shape of a resistive heating element to thereby produce a heating element mold (34). A composite mold (39) is prepared by embedding the heating element mold (34) into molds (36, 37) of a ceramic substrate. The composite mold (39) is sintered at a sintering temperature of 1700 DEG C or higher. During a process of raising the temperature to said sintering temperature, the composite mold (39) is kept in an oxygen containing atmosphere having an oxygen partial pressure of 2 x 10<-4> to 1.0 Torr for 7 minutes at a temperature of 1200 DEG C or higher.