| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrical resistance thin-film, which consists of iron and palladium and required by-components and in which a mean resistance temperature coefficient at 0-200 deg.C has 3,000×10<-6> . deg.C<-1> or more, and manufacture thereof, and to provide a contact combustion type gas sensor composed of an alloy thin-film or a resistance change type high-performance temperature sensor. SOLUTION: An electrical resistance thin-film having a high resistance temperature coefficient is provided by manufacturing an alloy made up of 10-70% iron and palladium as a residue at an atomic weight ratio onto an insulating substrate at a substrate temperature of 1,000 deg.C or lower or onto a substrate, in which an insulating film is formed onto the surface of a conductive substrate, or heating the alloy at a temperature from 200 deg.C to 1,000 deg.C in atmospheric air, a non-oxidizing gas, a reducing gas or a vacuum and cooling the alloy. Furthermore, a contact combustion type gas sensor using the thin-film and a resistance change type high-performance temperature sensor can be provided.</p> |
