IN-SITU MONITORING OF THE CHANGE IN THICKNESS OF FILMS,申请号KR19960010746-传众专利搜索

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发明名称	IN-SITU MONITORING OF THE CHANGE IN THICKNESS OF FILMS
摘要
申请公布号	KR100209042(B1)	申请公布日期	1999.07.15
申请号	KR19960010746	申请日期	1996.04.10
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION.	发明人	LI, LEPING;BARBEE, STEVEN GEORGE;HALPERIN, ARNOLD;HEINZ, TONY FREDERICK
分类号	G01B7/00;G01B7/06;H01L21/20;H01L21/302;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01B7/00
代理机构		代理人
主权项
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