LOADING/UNLOADING APPARATUS OF UVO3 AUTO CLEANER,申请号KR19960019859-传众专利搜索

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发明名称	LOADING/UNLOADING APPARATUS OF UVO3 AUTO CLEANER
摘要
申请公布号	KR100210619(B1)	申请公布日期	1999.07.15
申请号	KR19960019859	申请日期	1996.06.04
申请人	ANAM SEMICONDUCTOR., LTD.	发明人	JO, YOON-CHE;KIM, KYOUNG-NAM
分类号	H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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