| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a liquid crystal display substrate which obviates the occurrence of damage, such as cracks and wrinkles in color filter pixels and black matrices, has excellent patterning properties free of line thinning and disconnection, has resistance to an alkali, etc., and has practicability of excellent resistance and transmittance. SOLUTION: This liquid crystal display substrate is constituted by successively disposing a first layer: an oxygen-silicon based film of a film thickness 60 to 120 nm obtd. by applying a polysilazane soln. contg. org. polysilazane on a color filter, then heat treating the color filter, a second layer: a nitrogen- silicon based film of a film thickness 10 to 25 nm obtd. by sputtering deposition in a discharge gas formed by mixing argon and nitrogen and a third layer: an ITO film of a film thickness 350 to 450 nm obtd. by sputtering deposition in a discharge gas formed by mixing argon and oxygen on a color filter substrate for a color liquid crystal display panel.</p> |
