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发明名称
Member for semiconductor equipment
摘要
申请公布号
EP0885859(A3)
申请公布日期
1999.07.07
申请号
EP19980304757
申请日期
1998.06.17
申请人
BRIDGESTONE CORPORATION
发明人
TAKAHASHI, YOSHITOMO;WADA, HIROAKI;MIYAMOTO, TARO
分类号
C04B35/575;C30B25/12;C30B31/14;C30B35/00;(IPC1-7):C04B35/575
主分类号
C04B35/575
代理机构
代理人
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