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发明名称
SEMICONDUCTOR DEVICE AND INSPECTION AND OPERATION METHOD THEREFOR
摘要
申请公布号
JPH11162197(A)
申请公布日期
1999.06.18
申请号
JP19980228906
申请日期
1998.08.13
申请人
SIEMENS AG
发明人
KRAUSE GUNNAR
分类号
G01R31/28;G01R31/3185;G11C11/401;G11C29/04;G11C29/14;G11C29/48;H01L21/66;(IPC1-7):G11C29/00;G01R31/318;G11C29/00
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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