| 摘要 |
PROBLEM TO BE SOLVED: To realize high inspection accuracy, shortened inspection time and simplification of the inspection device, and enable to apply the inspection to integrated electronic parts. SOLUTION: To a visual inspection device 50 inspecting good/bad of visual state in an actuator body 14 by impressing a voltage for visual inspection to the actuator body 14, where an upper electrode is formed on a shape maintaining layer and a lower electrode is formed under the shape maintaining layer, a light detection part 54 electrically detecting the visual state of the actuator body 14 and a judging part judging good/bad of the visual state in the actuator body 14 based on detection signals S1 and S2 from the light detection part 54 are provided for constitution. |
