DEVICE FOR PRODUCING SILICA COATING AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To improve the productivity of a silica coating by continuously executing a producing process. SOLUTION: This device is provided with a conveyer 13 having a mounting part to be loaded with plural wafers 11 and conveying the wafers mounted to the mounting part, a vapor depositing part 15 positioned at the upper part of the conveyer 13, generating flame and vapor-depositing silica soot on the plural wafers, a calcining part 21 adjacent to the vapor depositing part 15 and removing the moisture in the silica soot and a sintering part 23 adjacent to the calcining part 21 and densifying the calcined silica soot to form the silica coating.