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发明名称
EQUIPMENT FOR FILM DEPOSITION AND FILM DEPOSITION THEREBY
摘要
申请公布号
JPH11121443(A)
申请公布日期
1999.04.30
申请号
JP19970275837
申请日期
1997.10.08
申请人
MATSUSHITA ELECTRON CORP
发明人
MAEJIMA TAKASHI
分类号
H01L21/205;H01L21/31;H01L21/316;(IPC1-7):H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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