发明名称 SAMPLE CARRYING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a sample carrying device which can stably carry samples prepared in a vacuum or deoxidized atmosphere by means of a sample preparing device to an analyzer. SOLUTION: A sample 21 prepared in a glove box maintained in an inert gas atmosphere is placed on a sample stage 20 in the glove box and a sample carrying device 10 is inserted into the glove box while an inert gas is introduced to the box from a gas supplying pipe 13. The projecting sections 12a of the cylindrical leg sections 12 of the device 10 are engaged with the upper groove 20a of the sample stage 20 in a state there the leg sections 12 wrap the stage 20 supporting the sample from the top side and the sample 20 is positioned in the closed space formed of the stage 20 and the leg sections 12 and cap section 11 of the device 10. When the closed space formed of the stage 20 and device 10 is then filled up with the inert gas supplied from the pipe 13, the sample is carried to the sub-chamber of an analyzer from the glove box together with the stage 20 and set in the sub-chamber.</p>
申请公布号 JPH1194714(A) 申请公布日期 1999.04.09
申请号 JP19970272198 申请日期 1997.09.18
申请人 RICOH CO LTD 发明人 YAMAMURO SATORU
分类号 G01N23/227;G01N1/00;H01L21/677;H01L21/68;(IPC1-7):G01N1/00 主分类号 G01N23/227
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