| 摘要 |
A low-cost and highly accurate acceleration sensor relying upon neither sophisticated semiconductor technology nor micromachining technology, and a method of producing the same. A silicon board (1) is used for only a portion where distortion develops due to acceleration and other auxiliary boards (4A, 4B), caps (8A, 8B) and mass bodies (6A, 6B) are made of glass. The silicon board (1), mass bodies (6A, 6B) and auxiliary boards (4A, 4B), as well as the auxiliary boards (4A, 4B) and caps (8A, 8B) are directly joined together. |
