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发明名称
Trockenätzverfahren
摘要
申请公布号
DE69228333(D1)
申请公布日期
1999.03.18
申请号
DE19926028333
申请日期
1992.05.26
申请人
SONY CORP., TOKIO/TOKYO, JP
发明人
KADOMURA, SHINGO, SHINAGAWA-KU, TOKYO, JP
分类号
H01L21/302;H01L21/3065;H01L21/311;H01L21/768;(IPC1-7):H01L21/311;H01L21/28
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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