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发明名称
Abschlussventil für Einkristallziehvorrichtung
摘要
申请公布号
DE69320579(T2)
申请公布日期
1999.03.11
申请号
DE19936020579T
申请日期
1993.09.29
申请人
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP
发明人
MIZUISHI, KOJI, C/O ISOBE FACTORY, ANNAKA-SHI, GUNMA-KEN, JP;YOKOTA, KOUZOU, C/O ISOBE FACTORY, ANNAKA-SHI, GUNMA-KEN, JP;OGINO, KATSUHIKO, C/O ISOBE FACTORY, ANNAKA-SHI, GUNMA-KEN, JP
分类号
F16K25/00;C30B15/00;F16K51/02;(IPC1-7):F16K51/02
主分类号
F16K25/00
代理机构
代理人
主权项
地址
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