发明名称 DEVELOPING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a developing device, which can perform uniform developing process with a small amount of developing solution on a photosensitive film on a substrate. SOLUTION: A developer discharging nozzle 11 starts the discharge of developer after the nozzle has started the movement to a substrate 100. A solution- removing member 16 is arranged in front of the substrate 100. The solution- removing member 16 is formed into an arc shape along the outer edge of the substrate 100. When the developer discharging nozzle 11 is passed on the solution removing member 16, the developer attached at the tip of the developing solution discharging nozzle 11 is removed by the solution-removing member 16. Thereafter, the developing solution discharging nozzle 11 reaches the substrate 100, moves along a scanning direction A, and discharges the developer during passage.
申请公布号 JPH1167622(A) 申请公布日期 1999.03.09
申请号 JP19970216372 申请日期 1997.08.11
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 MIMASAKA MASAHIRO;TANAKA AKIKO;TAKAMURA YUKIHIRO
分类号 G03F7/30;B05C5/02;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/30
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