| 摘要 |
PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor requiring no calibration and generating no drift by setting the ratios of the distances between flexible moving electrodes and fixed electrodes against the distances from the contact points to fulcrums of two or more sets of the flexible moving electrodes and the fixed electrodes to different values. SOLUTION: The distances between the contact points of flexible moving electrodes and the shaft of a torsion bar 103 are L1 , L2 , L3 , and the distances between the flexible moving electrodes and fixed electrodes 121-123 facing them are (g) for three sets. An equationθ=z/L is satisfied, where (z) is the displacement of a chip, L is the distance between a fulcrum and the tip of the chip, andθis the rotation angle of a lever. Whenθ=g/L1 , the flexible electrode is kept in contact with the fixed electrode 121. This contact can be detected by the conduction measurement between lead wires. The displacement (z) of the chip is gL/L1 at this time. The rotation angleθis determined by only the geometrical arrangement of a sensor, and it is not affected by the temperature change and aging change. The same rule is applied to the distances L2 , L3 .
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