METHOD FOR MANUFACTURING PAD CONDITIONER AND PAD CONDITIONER

摘要

The present invention relates to a method for manufacturing a pad conditioner and a pad conditioner, the method comprising the steps of: laminating a photosensitive film (23) on a base substrate (21), and forming a plurality of seating holes (25) on the photosensitive film (23) by etching; inserting abrasive particles (27) into the seating holes (25) and forming a plating layer which covers the photosensitive film (23) and the abrasive particles above the abrasive particles; removing the base substrate (21) and the photosensitive film (23); and melting a portion of the plating layer (31). The present invention has the advantages of even protrusion of the abrasive particles from the plating layer, and maintaining a uniform height of the uppermost end parts of the abrasive particles which protrude above the plated layer.