METHOD AND APPARATUS FOR RUN-TIME CORRECTION OF PROXIMITY EFFECTS IN PATTERN GENERATION,申请号EP19980902808-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR RUN-TIME CORRECTION OF PROXIMITY EFFECTS IN PATTERN GENERATION
摘要
申请公布号	EP0895652(A1)	申请公布日期	1999.02.10
申请号	EP19980902808	申请日期	1998.01.23
申请人	ETEC SYSTEMS, INC.	发明人	VENEKLASEN, LEE, H.;INNES, ROBERT;BABIN, SERGEY;TROST, DAVID;VARNER, JEFFREY
分类号	H01J37/305;H01J37/302;H01J37/317;H01L21/027;(IPC1-7):H01J37/302	主分类号	H01J37/305
代理机构		代理人
主权项
地址

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