发明名称 POSITIONING DEVICE AND METHOD OF WORK CONVEYING CARRIER
摘要 PROBLEM TO BE SOLVED: To provide a positioning device for a work conveying carrier, capable of reliably dropping a carrier to a conveying face, after a chip has been mounted on a work mounted in the carrier. SOLUTION: A vacuum-chucked pad 22 is provided in a backup member 20 pressing up a carrier which mounts a work from downward. An upper face of the vacuum-chucked pad 22 is projected from an upper face of the backup member 20 to upwards. If the backup member 20 is lifted up by a cylinder 23, the vacuum-chucked pad 22 vacuum-chucks a lower face of the carrier and is flatly and elastically deformed, so that its upper face is flush with that of the backup member 20. If a chip is finished mounting on the work, the backup member 20 is dropped. Then, the carrier is vacuum-chucked by the vacuum- chucked pad 22, while being forcedly dropped.
申请公布号 JPH1126544(A) 申请公布日期 1999.01.29
申请号 JP19970182018 申请日期 1997.07.08
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NAKANISHI TOMOAKI
分类号 H01L21/677;H01L21/52;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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