发明名称 Particle monitoring instrument
摘要 When a intensity of a signal from a light detector 14 to measure a scattered light exceeds a predetermined value, a motion of a particle 20 is displayed as a locus of the scattered light, by means of extending an exposure time of the scattered light to the light detector, or by means of increasing a pulse oscillation frequency of a laser beam 13, or by means of extending a pulse width of the laser light. And then a straight line connecting start and terminal points of the locus is displayed to superimpose on the locus. An origin of the particle is estimated by extending the straight line beyond the start point, and a destination point of the particle is estimated by extending the straight line beyond the terminal point. A mass of the particle is estimated by dividing a projective length of the straight line in a vertical direction by the exposure time of the scattered light.
申请公布号 US5861951(A) 申请公布日期 1999.01.19
申请号 US19970989630 申请日期 1997.12.12
申请人 NEC CORPORATION 发明人 UESUGI, FUMIHIKO;ITO, NATSUKO
分类号 G01N15/06;G01N15/02;G01N15/14;G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/00 主分类号 G01N15/06
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