CVD DEVICE, AND ITS CLEANING METHOD,申请号JP19970187443-传众专利搜索

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发明名称	CVD DEVICE, AND ITS CLEANING METHOD
摘要
申请公布号	JPH1112742(A)	申请公布日期	1999.01.19
申请号	JP19970187443	申请日期	1997.06.27
申请人	NISSIN ELECTRIC CO LTD	发明人	MIYAKE KOJI
分类号	C23C16/44;H01L21/205;(IPC1-7):C23C16/44	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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