| 摘要 |
PROBLEM TO BE SOLVED: To obtain the subject thin membrane having high gas-barrier effect while retaining the polymer's practical properties, also reduced in environmental burden in its production and disposal, and useful in electrical/electronic parts, etc., by subjecting a specific thin film to ionic irradiation treatment to effect carbonizing part of the thin film. SOLUTION: A thin film predominant in a polymer (e.g. polysulfone, polyimide composed of a recurring unit of the formula) is subjected to ionic irradiation treatment under an acceleration voltage of e.g. 0.1-3,000 keV to effect carbonizing part of the thin film so as to be 80-95 element % in the carbon element rate in the constituent elements determined by electron spectroscopy for chemical analysis(ESCA) on at least one surface of the thin film. It is preferable that the resultant aimed thin membrane has asperities 10-1,000 nm in height throughout at least one surface thereof, being >=0.3μm in thickness and representing a uniform, asymmetric or laminated structure.
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