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经营范围
发明名称
Testing semiconductor wafers.
摘要
申请公布号
GB2327149(A)
申请公布日期
1999.01.13
申请号
GB19980014718
申请日期
1998.07.07
申请人
* NEC CORPORATION
发明人
TETSUNORI * MAEDA
分类号
G01R11/22;G01R31/3185;G06F11/22;H01L21/66;(IPC1-7):H01L21/66;G01R31/28
主分类号
G01R11/22
代理机构
代理人
主权项
地址
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