发明名称 MEASURING METHOD FOR THICKNESS OF LAYER BY IMAGE PROCESSING AND ITS DEVICE
摘要 PROBLEM TO BE SOLVED: To perform total inspection by automatizing conventional visual sampling inspection process. SOLUTION: A translucent mirror 8 is set between a blank 1 and a first CCD camera 5, and downward lighting 9 for irradiating a measuring object face is projected onto the translucent mirror 8, and an image picked up by the first CCD camera 5 is inputted into a computing device 10, and after an addition is carried out as the color brightness of every picture element is scanned in a direction parallel to the extending direction of each layer, a difference between data separated more than one of obtained added data is computed in order, and this device is equipped with an acceptance or rejection judging function which recognizes a dissociation peak as the boundary of a layer and judges whether a space between boundaries exists within a preset range or not.
申请公布号 JPH10332341(A) 申请公布日期 1998.12.18
申请号 JP19970146103 申请日期 1997.06.04
申请人 SUMITOMO ELECTRIC IND LTD 发明人 SHINOKI HIDEJI;KONISHI TAKANORI
分类号 G01B11/02;G06T1/00;G06T7/00 主分类号 G01B11/02
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