发明名称 AIRTIGHT CONTAINER AND AIRTIGHT CONTAINER ATMOSPHERE REPLACER AND ATMOSPHERE REPLACING METHOD
摘要 PROBLEM TO BE SOLVED: To completely replace the atmosphere in an extremely short time. SOLUTION: There are small holes in a diffusion plate 31 expanding along inside faces of a box 15 of a movable airtight container 11 which face each other. Therefore, when nitrogen is supplied from a nitrogen supply pipe 25 and also the atmosphere is discharged from a discharge pipe 27, a flow 29 of nitrogen which is a layer flow is formed. For this reason, it is hard to mix the atmosphere filling the movable airtight container 11 with nitrogen, and the atmosphere is pressed by nitrogen and discharged effectively, and also nitrogen reaches all the corners in the movable airtight container 11 for an extremely short time.
申请公布号 JPH10321714(A) 申请公布日期 1998.12.04
申请号 JP19970145922 申请日期 1997.05.20
申请人 SONY CORP 发明人 SAGA KOICHIRO
分类号 B65D81/20;B65D85/86;H01L21/00;H01L21/02;H01L21/673 主分类号 B65D81/20
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