APPARATUS FORDEGASSING FLUID,申请号JP19970125393-传众专利搜索

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发明名称	APPARATUS FORDEGASSING FLUID
摘要
申请公布号	JPH10314503(A)	申请公布日期	1998.12.02
申请号	JP19970125393	申请日期	1997.05.15
申请人	SONY CORP	发明人	KONO TAKASHI
分类号	B01D19/00;H01L21/027;(IPC1-7):B01D19/00	主分类号	B01D19/00
代理机构		代理人
主权项
地址

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