| 摘要 |
PURPOSE:To detect edges corresponding to various shapes of waveforms by dynamically executing a global collation and the detailed collation of complicated one-dimensional waveforms. CONSTITUTION:Approximate waveforms G(X) are obtained by executing the filtering of a certain filter size SIGMA at respective positions of reference one-dimensional waveforms F(X), and X-coordinates to satisfy an expression d<s>G/dX<s>=0 are obtained as reference feature coordinates. Further, approximate waveforms g(x) are obtained by executing the filtering of a certain filter size sigma at respective positions of input one-dimensional signal waveforms f(x), and x-coordinates to satisfy an expression d<s>g/dx<2>=0 are obtained as a feature coordinates. A T(X) is made into a coordinate transforming expression expressed by the polynomial of X, one combination out of the combinations of some of the reference feature coordinates and some of the feature coordinates, which makes a square error delta=SIGMA(T(Xi)-xi)<2> into the minimum, is obtained, and when the error delta is a certain value or below, the corresponding position of the error deltais made into a collated result. Thus, a circuit pattern having the waveform of a complicated edge part can be measured. |
