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发明名称
CHAMBER CONDITION MEASURING APPARATUS FOR DRY-ETCHING EQUIPMENT
摘要
申请公布号
KR0127362(Y1)
申请公布日期
1998.12.01
申请号
KR19920025935U
申请日期
1992.12.21
申请人
LG SEMICONDUCTOR CO.,LTD
发明人
KIM, JAE-DAL
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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