ROTATING DRYING DEVICE FOR WAFER,申请号KR19940033972U-传众专利搜索

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发明名称	ROTATING DRYING DEVICE FOR WAFER
摘要
申请公布号	KR0126548(Y1)	申请公布日期	1998.12.01
申请号	KR19940033972U	申请日期	1994.12.14
申请人	HYUNDAI ELECTRONICS IND. CO.,LTD	发明人	YU, HAE-SAN;KIM, YONG-PYO;JI, JAE-POONG
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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