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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10313116(A)
申请公布日期
1998.11.24
申请号
JP19970058726
申请日期
1997.03.13
申请人
TOSHIBA CORP
发明人
NAKAGAWA AKIO;MATSUSHIRO TOMOKO;SUGIYAMA NAOHARU;YASUHARA NORIO;KUROBE ATSUSHI;FUNAKI HIDEYUKI;KAWAGUCHI YUSUKE;YAMAGUCHI YOSHIHIRO
分类号
H01L27/088;H01L21/336;H01L21/8222;H01L21/8234;H01L21/8248;H01L27/04;H01L27/06;H01L29/739;H01L29/78;(IPC1-7):H01L29/78;H01L21/822;H01L21/823
主分类号
H01L27/088
代理机构
代理人
主权项
地址
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