Thin film coating method for magnetic record carrying disks,申请号DE19971020251-传众专利搜索

发明名称	Thin film coating method for magnetic record carrying disks
摘要	is used to coat thin film magnetic plates having a substrate. The method involves sputtering the magnetic substrates to provide a layer system, with a lower layer, a magnetic memory layer and a cover layer. While applying the lower layer and/or the magnetic memory layer, the energy is fed into the plasma in pulse form. A pulse repetition frequency of (10) to (80) kHz is set. For a predetermined layer thickness the ratio of pulse length and pulse duration is set according to the target value for the coercivity field strength. Preferably the substrate temperature on applying the lower layer and/or the magnetic layer is set to 200 to 230<o>C. The pressure is preferably set to 0.8 Pa.
申请公布号	DE19720251(A1)	申请公布日期	1998.11.19
申请号	DE19971020251	申请日期	1997.05.15
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE;INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	GOEDICKE, KLAUS, 01307 DRESDEN, DE;WINKLER, TORSTEN, 01454 RADEBERG, DE;JUNGHAEHNEL, MICHAEL, 01324 DRESDEN, DE;LANG, ARTUR, 67551 WORMS, DE;MEYER, DIETER, 61231 BAD NAUHEIM, DE;MUELLER, MANFRED, 55270 ESSENHEIM, DE;SCHNEIDER, HANS-HERRMANN, 55262 HEIDESHEIM, DE;SCHNEIDER, RAINER C., 65474 BISCHOFSHEIM, DE
分类号	C23C14/32;G11B5/84;G11B5/85;G11B5/851;(IPC1-7):G11B5/85	主分类号	C23C14/32
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