| 摘要 |
A three-axis sensor device, such as a probe, includes a base structure and a stylus supporting member. The base structure and stylus supporting member are connected by three linkages that limit movement of the stylus supporting member relative to the base structure to movement along the three linear axes. Each linkage includes parallel articulated legs that limit rotational motion of the stylus supporting member. Three sensors also are disposed between the base structure and the stylus supporting member to sense movement of one with respect to the other.
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