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发明名称
VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERSTRUKTUR
摘要
申请公布号
DE59309045(D1)
申请公布日期
1998.11.12
申请号
DE19935009045
申请日期
1993.02.10
申请人
DAIMLER-BENZ AKTIENGESELLSCHAFT, 70567 STUTTGART, DE
发明人
BODENSOHN, ALEXANDER DIPL.-ING, 63512 HAINBURG, DE;HENKEL, HEINZ, 63179 OBERTSHAUSEN, DE
分类号
H01L21/822;H01L27/04;H01L29/06;(IPC1-7):H01L29/06
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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