| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve a measurement sensitivity and an S/N ratio and to minimize the change in flow-rate detection characteristics when the biasing of flowing water occurs by providing a support member that has a width-expanding part and incorporates a flow-rate sensor on a side surface in a detection pipe being provided in a fluid channel. SOLUTION: Even if the flow-rate distribution of a measurement fluid that flows through a fluid channel 21 is biased, the change in the amount of flow into a detection pipe 26 is small if the flow rate is equal. Also, in the support member 27, a width- expanding part is provided at the upstream and downstream sides of a flow-rate sensor 28, so that the channel section in the detection pipe 26 is cupped and a flow rate is accelerated and a release on the surface of the support member 27 is suppressed. Also, since the surface of the flow-rate sensor 28 opposes the inner-wall surface of the detection pipe 26, a flow is regulated in parallel, thus achieving a stabilized flow without any release and hence obtaining an improved S/N ratio. Further, since the flow is in parallel on the surface of the flow-rate sensor 28, the collision of dust in the fluid against the flow-rate sensor 28 and hence an adhesion can be prevented, thus preventing flow-rate detection characteristics from changing even after a long-term use.</p> |
