| 摘要 |
A sensor unit (50), a process and a device are disclosed for inspecting the surface (10', 10'') of an object (10) for determining its surface characteristics, such as structural disturbances. The device has a transmitter module (51) which emits at least one radiation beam (6, 6', 6'') and a receiver module (52) with at least one photo-receiver (15, 16, 20). A rotating polygonal mirror wheel (2) is arranged in the focal point of a parabolic mirror (1) onto which the radiation beam (6) from the laser (3, 4) is directed by telecentric optics which guide the transmitter and receiver beam on the same optical axis. The parabolic mirror (1) guides the deflected radiation beam (6, 6', 6'') over the object (10) at a constant angle relative to the axis of symmetry (7) of the parabolic mirror (1), along a scanning line (23, 24). The reflected radiation beam falls onto the processing unit (5) after being reflected out of the common radiation path.
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