Vorrichtung zum Bewegen von Substraten durch eine Substrat-Behandlungseinrichtung
摘要
In order to obtain a device as simple and flexible as possible for conveying substrates (7) through a substrate processing plant (11), the device has a base conveyor belt (2) and two lateral conveyor belts (4, 6) which are all provided with notches for holding the substrates (7) in an upright position.
申请公布号
DE19716123(A1)
申请公布日期
1998.10.22
申请号
DE19971016123
申请日期
1997.04.17
申请人
STEAG HAMATECH GMBH MACHINES, 75447 STERNENFELS, DE
发明人
MAHNER, BERND, 75447 STERNENFELS, DE;WEBER, KLAUS, 75447 STERNENFELS, DE
