| 摘要 |
<p>On the piezoelectric element (2), a plurality of piezoelectric walls (3) and concave grooves (4) are formed so as to be arranged alternately and parallel to each other. Thereafter, a conductive layer (Ds) of a metallic thin film is formed on the back end surface (12B) and the bottom surface (2C) opposite to the grooved side of the actuator board (2), side surfaces of the piezoelectric walls (3), and the electrodes (5) are conductably connected with the conductive layer (Ds). Then, the actuator board (2) is subjected to a dicing process or the like to form a plurality of dividing lateral grooves (15) on a back end surface (2B) and a bottom surface (2C) of the actuator board (2), forming a plurality of divided conductive patterns (7) extending in the front and rear direction of the actuator board (2), and additionally, to form a dividing longitudinal groove (16) intersecting with the lateral grooves (15) on the bottom surface (2C), separating the conductive patterns (7) from other portions of the conductive layer (Ds).</p> |
