| 摘要 |
PROBLEM TO BE SOLVED: To obtain an image-processing apparatus which can inspect the defect of an object accurately without informing wrong even when a shape of the object to be inspected is varied or an image of the object to be inspected looks different. SOLUTION: The apparatus is provided with a camera 1 to separately pick up images of a teaching sample and an object to be inspected. The apparatus further includes a CPU 5 which generates proper image data from a teaching image as the image of the teaching sample picked up by the camera 1, restores an approximate image from an inspection image as the picked-up image of the object to be inspected and the generated proper image data, generates and binarizes a difference image between the inspection image and approximate image, carries out a particle analysis to the binarized image, and judges whether or not the object to be inspected is good. |
