| 摘要 |
PROBLEM TO BE SOLVED: To provide a control device at low cost and a control method capable of controlling a motor for a substrate treatment in real time in desired transit speed while monitoring the actual rotational speed of the motor and the substrate treatment with the control device. SOLUTION: A pulse generation controller 22 generates a pulse train PLS along a frequency profile specified by a parameter set by a CPU 21. The CPU 21 sets the parameter such as the adjustable speed rate of the next speed step after the pulse train PLS generated by the pulse generation controller 22 enters a constant speed region, controls an external condition when reaching a fixed value of the rotational speed of a motor 12 is detected by a speed detecting section 23, and monitors the state of the external condition. When a starting trigger signal is generated by a trigger generating section 18, the CPU 21 sets the parameter of target frequency at the next speed step, and a speed step transfers to the next speed step. |
