| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning type probe microscope wherein an excitation light generated by a tunnel current flowing in the part between a probe and a specimen is accurately detected in a short time without damaging the specimen, and the light can be applied to indentification of elements in the respective parts of an STM image. SOLUTION: A light guide probe 3 is installed which guides an excitation light generated by a tunnel current flowing in the part between a scanning probe 1 of a scanning type tunnel microscope and a specimen W, to spectral detectors 9, 10. On the basis of S/N of the spectral detectors which corresponds to a plurality of tunnel current values, the values and the scanning speed of the canning probe 1 are automatically set. Thereby spectrum effective in spectral analysis of excitation light can be obtained in a short time without damaging the specimen W.
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